Lub volt -ampere yam ntxwv nkhaus ntawm 172 nm excimer lub teeb roj paug
3.3.7 Luminescence Phenomena hauv Gas Discharge
Niaj hnub nimno Ion Plating Technology
(Kev txuas ntxiv ntawm Luminescence Phenomena hauv Gas Discharge)
Excitation Luminescence
Resonantly zoo siab atoms yuav hloov rov qab mus rau qib zog ruaj khov nyob rau hauv 10⁻⁸ s, tso lub zog absorbed thaum lub sij hawm hloov pauv. Lub zog no yog emissions nyob rau hauv daim ntawv ntawm photons, ua excitation luminescence. Nyob rau hauv tej yam tsawg - siab tso tawm, xws li cov xenon, cov txheej txheem no tseem tuaj yeem tsim lub tshuab nqus tsev ultraviolet hluav taws xob, suav nrog 172 nm excimer lub teeb.
Recombination Luminescence
Nyob rau hauv qhov chaw tawm, thaum ions ntsib electrons, lawv recombine los tsim cov atoms ruaj khov. Lub zog pib absorbed yog tso tawm nyob rau hauv daim ntawv ntawm photons thaum lub sij hawm recombination txheej txheem, ua recombination luminescence.
Vim qhov sib txawv ntawm cov qauv atomic thiab lub zog ntawm cov qib hluav taws xob hluav taws xob, qhov zaus ntawm excitation luminescence thiab recombination luminescence sib txawv, ua rau cov xim luminescence sib txawv. Thaum lub sij hawm ion plating, cov txheej txheem xws li recombination ntawm electrons thiab ions, peb - lub cev recombination ntawm hlau ions, electrons, thiab cov tshuaj tiv thaiv gases, thiab kev hloov ntawm resonantly zoo siab atoms rov qab mus rau lub xeev ruaj khov tsis tu ncua tshwm sim, generating luminescence. Qhov hnyav dua qhov ionization, qhov muaj zog dua qhov kev siv lub teeb. Cov ntsiab lus sib txawv muaj cov qib hluav taws xob sib txawv, yog li lawv cov xim luminescence txawv: argon emits lub ntuj -xiav, thiab titanium nitride films tso nrog nitrogen 通入 qhia txog cherry - xim liab. Los ntawm cov txheej txheem tshuaj tiv thaiv saum toj no, nws tuaj yeem pom tau tias nyob rau hauv qhov chaw tawm ntawm ion plating, siab - lub zog hluav taws xob tsis tu ncua sib tsoo inelastically nrog roj, ua rau siab - lub zog zoo siab atoms thiab ions. Cov siab no -lub zog zoo siab atoms thiab ions tom qab ntawd dhau los ntawm kev sib tsoo nyuaj nrog qis- lub zog roj atoms thiab hlau atoms, ua rau ions thiab atoms ntawm ntau qib zog hauv qhov chaw tawm. Qhov chaw tso tawm yog ntim nrog ntau cov khoom nquag, uas nws lub zog ntau dua li cov pa roj atoms thiab cov hlau atoms evaporated. Tag nrho cov siab - lub zog hais nyob rau hauv qhov chaw plating yog los ntawm siab - lub zog hluav taws xob. Yog li ntawd, qhov ntau electrons muaj nyob rau hauv qhov chaw plating, qhov siab dua - lub zog hais tam sim no thaum plating, siab dua tag nrho lub zog ntawm cov zaj duab xis hais, thiab qhov zoo dua yog rau cov tshuaj tiv thaiv los ua cov yeeb yaj kiab zoo. Niaj hnub nimno ion plating technologies siv zog kom tau txais ntau electrons los ua kom cov plasma ntom nyob rau hauv lub plating qhov chaw, li no pab txhawb tag nrho cov zog ntawm zaj duab xis hais.
3.4 Gas tso tawm
3.4.1 Cov txheej txheem ntawm kev tso pa tawm
Avalanche Tshem Tawm
Tshem tawm lub thawv; Thaum lub tshuab nqus tsev kawm ntawv nyob nruab nrab ntawm 1∼10 Pa, tig lub zog ntawm lub cathode thiab anode. Nyob rau ntawm no, cov thawj electrons nyob rau hauv lub tshuab nqus tsev chamber accelerate nyob rau hauv qhov kev txiav txim ntawm hluav taws xob teb. Thaum lub zog hluav taws xob nce mus txog ib qho nqi, lawv sib tsoo nrog cov roj nruab nrab ntawm cov roj molecules thiab ionize lawv. Ions nrawm mus rau cathode, thiab electrons nrawm mus rau lub anode; Thaum lub sijhawm ua haujlwm no, kev sib tsoo ntau dua ionization tshwm sim, thiab cov khoom siv hluav taws xob tau nce sai, tsim cov txheej txheem electron avalanche (tseem hu ua avalanche tawm), raws li qhia hauv daim duab 3-5 [3]. Qhov kev tso tawm no yog ib qho uas tsis yog - cov txheej txheem tawm ntawm tus kheej; Yog hais tias tus thawj ionization qhov chaw raug tshem tawm, qhov paug tawm tam sim ntawd.
Los ntawm Paschen nkhaus, nws tuaj yeem pom tau tias muaj qhov tsawg kawg nkaus cathode voltage yuav tsum tau pib ci tawm. Kev xyaum qhia tau hais tias ib zaug pib tso pa tawm, qhov hluav taws xob tawm hluav taws xob poob qis, qhia tias qhov hluav taws xob xaiv hluav taws xob tsis yog qhov hluav taws xob tsawg kawg nkaus. Feem ntau, tom qab cov roj tau ignited, qhov hluav taws xob tawm tau txo qis rau qhov hluav taws xob uas tswj tus kheej - paug tawm. Piv txwv li, qhov hluav taws xob hluav taws xob ntawm argon tawm nrog hlau- cov khoom siv yog kwv yees li 265 V.
3.4.2 Volt-Ampere yam ntxwv nkhaus ntawm cov pa tawm
Kev ntsuas qhov Volt -Ampere Characteristic Curve
Qhov voltage-tam sim no hloov pauv nkhaus ntawm ob lub electrodes ntawm cov pa tawm yog hu ua volt-ampere yam ntxwv nkhaus. Daim duab 3-7 qhia cov cuab yeej ntsuas qhov volt-ampere tus yam ntxwv nkhaus ntawm cov pa tawm [10], qhov twg Eₐ yog DC fais fab mov thiab Rₐ yog qhov hloov pauv hloov tau. Tom qab tig lub hwj chim mov Eₐ, ntsuas qhov voltage thiab tam sim no ntawm cov electrodes, thiab npaj qhov voltage-tam sim no variation nkhaus thaum lub sij hawm roj tso tawm, piv txwv li, volt-ampere yam ntxwv nkhaus [3−12].
Yam ntxwv ntawm Volt-Ampere Characteristic Curve
Daim duab 3-8 qhia qhov volt-ampere yam ntxwv nkhaus ntawm cov pa tawm [3]:
Tsis yog-Tus kheej-Sustained Dark Discharge Region (Ⅰ)
Hauv ntu AB ntawm daim duab 3-8, qhov tsis muaj zog tam sim no (10⁻¹² A) tshwm sim thaum qhov hluav taws xob maj mam nce ntawm 0. Qhov tam sim no yog tsim los ntawm qhov chaw ionization tshwm sim los ntawm cov hluav taws xob nyob hauv qhov chaw. Hauv cheeb tsam no, txawm hais tias qhov tso tawm tam sim no nce nrog qhov sib cuam tshuam - electrode voltage, tam sim no tsis muaj zog thiab tsis muaj luminescence pom; qhov no yog hu ua non-tus kheej-sustained tsaus nti tawm, uas belongs rau avalanche-zoo li Townsend paug txheej txheem.
Tus kheej -Sustained Dark Discharge Region (Ⅱ)
Pib los ntawm taw tes B, tus kheej - theem kev tso tawm mus tas li pib, ua avalanche-zoo li Townsend tawm. Qhov voltage ntawm point B (Vᵇ, tseem hu ua breakdown voltage) feem ntau yog siab tshaj qhov tsawg kawg nkaus ignition voltage Uₘᵢₙ nyob rau hauv cov kev sim (p,d). Tsis muaj zog luminescence tshwm nyob rau ntu BC, uas yog hu ua tus kheej - thaj tsam tawm qhov tsaus nti.
Transition Region (Corona Discharge Region Ⅲ, Early Normal Glow Discharge Region Ⅳ)
Yog tias qhov kev tiv thaiv hauv Circuit Court tsis loj, cov paug tawm sai sai mus rau taw tes E los ntawm thaj tsam kev hloov pauv: qhov hluav taws xob poob qis rau Vₙ, qhov tam sim no nce sai sai, thiab muaj zog ci ntsa iab tshwm rau ntawm cathode, nkag mus rau thaj tsam ib txwm ci ntsa iab.
Ib cheeb tsam Glow Discharge (Ⅴ)
Los ntawm volt -ampere tawm tus yam ntxwv nkhaus, Vᵇ yog qhov hluav taws xob hluav taws xob, thiab Vₙ yog qhov hluav taws xob uas tswj xyuas qhov hluav taws xob zoo li qub (piv txwv li, Uₘᵢₙ hauv Paschen nkhaus). Tom qab hloov mus rau ib txwm glow tawm ntawm point E, tsuas yog ib feem ntawm lub cathode nto emits lub teeb (hu ua cathode chaw). Txo qhov tam sim no - txwv cov resistor ua rau thaj tsam ci ntsa iab. Lub inter-electrode tam sim no nce nrog thaj chaw ci, tab sis qhov hluav taws xob ntawm cov hluav taws xob zoo li qub tseem nyob tas li- qhov no yog tus yam ntxwv ntawm lub teeb ci li qub.
(Cov lus piav qhia rau daim duab 3-8: Volt-Ampere Characteristic Curve of Gas Discharge Ⅰ-Tsis yog-Tus Kheej-Sustained Dark Discharge Region Ⅱ-Self-Sustained Dark Discharge Region{8} Ⅳ-Early Normal Glow Discharge Region Ⅴ-Normal Glow Discharge Region Ⅵ-Tshwj xeeb Glow Discharge Region Ⅶ{12}}Siv cheeb tsam los ntawm Glow mus rau Arc Discharge Ⅷ-Arc Discharge Region Vᵇtage-Arc Discharge Region Vᵇisage Vₙ-Normal Glow Discharge Voltage Vᵍ-Arc Discharge Voltage)
Abnormal Glow Discharge Region (Ⅵ)
Thaum qhov chaw cathode npog tag nrho cov cathode nto (piv txwv li, ncav cuag F), lub inter-electrode tam sim no nce raws li qhov inter-electrode voltage nce- qhov no yog qhov txawv txav glow paug theem. Segment FG nthuav tawm cov yam ntxwv ntawm qhov txawv txav glow, nrog qhov ceev tam sim no ntawm mA / cm². Nyob ze ntawm G, lub cathode tam sim no ceev yog siab heev; lub zos cathode yog rhuab mus rau ib tug muaj zog thermionic emission lub xeev, qhov chaw tsis kam txo, qhov voltage poob sharply, tam sim no nce sai sai, thiab nws yooj yim hloov mus rau arc paug.
Transition Region ntawm Glow mus rau Arc Discharge (Ⅶ)
Pib los ntawm taw tes G, inter-electrode voltage poob los ntawm ntau pua volts mus rau kaum tawm volts, thiab qhov ceev tam sim no dhia los ntawm mA / cm² qib mus rau qib 100 A / cm². Point G yog qhov hluav taws xob hluav taws xob arc, thiab ntu GH yog thaj chaw hloov pauv ntawm qhov txawv txav mus rau arc tawm. Qhov tshwm sim no yooj yim ua tiav yog tias lub hwj chim tso cai.
Arc Discharge Region (Ⅷ)
Pib los ntawm taw tes H, nws nkag mus rau thaj tsam ruaj khov nrog qhov hluav taws xob ntawm kaum tawm volts thiab qhov ceev tam sim no siab dua 100 A / cm². Hauv cov ntawv thov tshwj xeeb, zoo ib yam li qis - qhov chaw siab tuaj yeem tsim cov pa tawm ultraviolet, xws li 172 nm excimer lub teeb los ntawm kev zoo siab xenon dimers.
