Lub hauv paus ntsiab lus thiab Optical Metrology ntawm 222 nm uv lub teeb Radiation Propagation
Khoom thiab Electromagnetic Spectrum ntawm Electromagnetic Waves
Lub teeb yog electromagnetic yoj. Raws li Maxwell txoj kev xav electromagnetic, ib lub sij hawm - txawv hluav taws xobE(los yog magnetic tebH) nyob rau hauv ib cheeb tsam ntawm qhov chaw yuav induce ib tug sib txawv magnetic tebH(los yog hluav taws xobE) nyob rau hauv cheeb tsam uas nyob ib sab. Cov alternating sib txawv hluav taws xob thiab magnetic teb tsis tu ncua tsim ib leeg thiab propagate los ntawm qhov chaw ntawm ib tug ceev ceev, tsim electromagnetic tsis. Electromagnetic nthwv dej nthuav tawm cov khoom hauv qab no:
(1) Ob qho tib si hluav taws xobEthiab magnetic tebHLub electromagnetic nthwv dej yog perpendicular rau cov kev taw qhia ntawm propagation, thiab peb vectors (E, H, thiab propagation direction) yog ob leeg perpendicular. Yog li, electromagnetic tsis yog transverse waves. Cov vectors E, H, thiab cov kev taw qhia nthuav tawm tsim ib txoj cai - tes ntsia hlau.
(2) Rau ib qho hluav taws xob nthwv dej propagating nyob rau hauv ib qho kev taw qhia,EthiabHoscillate nyob rau hauv lawv cov dav hlau sib xws -ib yam ntxwv hu ua polarization.
(3) Txhua qhov chaw hauv qhov chaw,EthiabHundergo periodic variations thiab nyob rau hauv theem, ncav maxima thiab minima ib txhij.
(4) Thaum twg los xij thiab ib qho instant, qhov loj ntawm kev sib raug zoo ntawmEthiabHyog εE=μH.
(5) Kev nthuav tawm ceev ntawm electromagnetic nthwv dej hauv lub tshuab nqus tsev yog c=1/√(ε₀μ₀), thiab hauv nruab nrab nws yog v=1/√(εμ).
Electromagnetic nthwv dej nthuav dav dav dav heev, los ntawm cov xov tooj cua tsis muaj suab nrov thiab cov nthwv dej kho qhov muag mus rau X-rays thiab -rays- txhua tus muaj nyob hauv tib qeb, sib txawv tsuas yog nyob rau hauv wavelength. Tam sim no tshawb pom thiab siv dav siv hluav taws xob hluav taws xob ntau ntawm cov wavelengths ntev dua 10⁴ m mus rau luv dua 10⁻⁵ nm. Thaum teem los ntawm zaus los yog wavelength, lawv tsim cov electromagnetic spectrum. Cov hluav taws xob kho qhov muag tsuas yog ib ntu me me ntawm cov spectrum no, nrog rau cov hluav taws xob ultraviolet yog qhov tseem ceeb ntawm peb txoj kev kawm.
Optical Radiation
Lub zog uas propagates nyob rau hauv daim ntawv ntawm electromagnetic nthwv dej los yog hais (photons), muaj peev xwm ntawm reflected, imaged, los yog dispersed los ntawm optical ntsiab, nrog rau nws cov txheej txheem propagation, yog collectively hu ua optical radiation. Nws yog feem ntau txiav txim siab los npog wavelengths ntawm 10 nm mus rau 1 mm (frequencies ~ 3 × 10¹¹ txog 3 × 10¹⁶ Hz). Cov hluav taws xob kho qhov muag feem ntau muab faib ua peb ntu raws li lub wavelength thiab tib neeg pom cov lus teb: ultraviolet hluav taws xob, pom lub teeb, thiab hluav taws xob infrared. Wavelengths feem ntau yog qhia nyob rau hauv nm rau qhov pom - mus rau -ultraviolet ntau yam, nyob rau hauv μm rau infrared, thiab wavenumbers yog conventionally muab nyob rau hauv cm⁻¹.
Ultraviolet hluav taws xob muaj luv luv wavelength tshaj li lub teeb violet thiab pom tsis tau rau tib neeg lub qhov muag, hla 1-390 nm. Nws yog subdivided rau ze -UV, deb-UV, thiab siab heev-UV. Huab cua heev-UV yuav luag tag nrho los ntawm huab cua thiab tuaj yeem nthuav tawm hauv lub tshuab nqus tsev, yog li nws tseem hu ua lub tshuab nqus tsev ultraviolet (VUV). Hauv kev tshawb fawb hnub ci UV, cov hluav taws xob ultraviolet feem ntau muab faib ua UVA, UVB, thiab UVC bands.
Tshwj xeeb, deb - ultraviolet teeb tsim los ntawm a222nm uv teeb(ib lub teeb KrCl* excimer) tau nyiam ntau heev nyob rau xyoo tas los no rau cov neeg tsis muaj chaw nyob -chaw tua kab mob hauv thaj chaw pej xeem. Nws lub zog photon siab, muaj zog nqus los ntawm oxygen hauv huab cua, thiab qhov tob tob tob tob hauv tib neeg cov tawv nqaij (tso rau stratum corneum) ua rau nws muaj kev nyab xeeb thiab siv tau zoo.
Yuav kom piav qhia ntau npaum li cas cov hluav taws xob kho qhov muag, yuav tsum muaj lub cev tshwj xeeb. Kev kuaj pom thiab ntsuas cov hluav taws xob kho qhov muag siv ob lub tshuab sib txawv: cov khoom siv hluav taws xob thiab cov duab hluav taws xob.
Lub tshuab hluav taws xob siv hluav taws xob siv hluav taws xob hluav taws xob (lossis lub zog hluav taws xob) thiab lub zog hluav taws xob raws li qhov tseem ceeb, nyob ntawm qhov khoom siv hluav taws xob nkaus xwb. Basic units yog watt (W) thiab joule (J). Radiometry siv thoob plaws tag nrho cov electromagnetic spectrum.
Lub photometric system qhia txog qhov pom kev ci ntsa iab. Nws qhov tseem ceeb kom muaj nuj nqis yog luminous siv, nrog rau chav tsev yooj yim candela (cd). Photometry tsuas yog siv tau rau qhov pom ntau yam.
Txawm hais tias lub cev muaj nuj nqis nyob rau hauv ob lub cev sib txawv ntawm lub tswv yim, lawv cov cim sib raug rau ib qho - rau - ib qho. Radiometric quantities yog denoted nrog subscript "e", photometric ntau nrog subscript "v".
Lub ntsiab lus kawg ntawm Maxwell txoj kev xav yog qhov muaj nyob ntawm electromagnetic tsis, thiab lub teeb yog electromagnetic yoj. Lub teeb yog qhov tseem ceeb tsis txawv ntawm xov tooj cua nthwv dej, microwaves, X-rays, lossis -rays tshwj tsis yog nyob rau hauv wavelength ntau yam. Raws li qhov kev xav no, kev txo qis ntawm lub teeb siv hauv qhov chaw tuaj yeem suav tau. Nyob rau hauv phau ntawv no, ultraviolet ntsuas qhov deb yog luv luv (tsuas yog kaum ntawm meters), yog li qhov nruab nrab ntawm kev nthuav tawm tuaj yeem suav tias yog qhov sib xws, thiab cuam tshuam ntawm qhov ntsuas qhov ntsuas qhov ntsuas thiab qhov ntsuas huab cua tsis saib xyuas. Kev ntsuas tom qab kho qhov nruab nrab li lub tshuab nqus tsev.
Cov kev cai lij choj ntawm kev ntsuas hluav taws xob kho qhov muag
Ib qho hluav taws xob muaj peev xwm ua tau los ntawm kev siv hluav taws xob, kev tawm hluav taws xob (radiant flux density), thiab radiant flux los piav txog nws lub zog thiab spatial zog faib.
Radiant siv yog lub zog radiant emitted los ntawm ib qhov chaw ntawm ib chav tsev khoom lub kaum ntse ntse, xav txog lub angular tis ntawm lub zog radiant.
Radiant exitance (radiant flux density) yog tag nrho cov hluav taws xob hluav taws xob tso tawm hauv ib cheeb tsam, uas qhia txog qhov ntom ntom ntom ntom nti.
Radiant flux yog tag nrho lub zog tawm los ntawm tag nrho qhov chaw mus rau hauv qhov chaw (lub sij hawm tus nqi ntawm lub zog radiant).
Radiance txhais tau tias yog lub zog hluav taws xob tso tawm rau ib cheeb tsam hauv cheeb tsam hauv kab - ntawm - pom kev taw qhia ib chav tsev lub kaum ntse ntse. Cov kev sib raug zoo ntawm radiant siv, radiant tawm, radiant flux, thiab radiance yog qhia raws li:
Integrating radiance tshaj qhov chaw yields radiant siv: J=∫ₐ N cosθ dA (3-1)
Integrating radiance tshaj lub kaum ntse ntse yields radiant tawm: M=∫ₒ N cosθ dΩ (3-2)
Muab ob npaug rau kev sib koom ua ke ntawm cheeb tsam thiab lub kaum ntse ntse yields radiant flux: Φ=∫ₐ ∫ₒ N cosθ dA dΩ (3-3)
Qhov twg: N - radiance ntawm qhov chaw; dA - qhov chaw qhov chaw; θ - lub kaum sab xis ntawm emission kev taw qhia thiab nto li qub; dΩ - lub kaum ntse ntse; cosθ dA - qhov projected cheeb tsam nyob rau hauv cov kev taw qhia emission.
Irradiance muaj tib qhov ntev li radiant tawm (W / cm²), tab sis hais txog lub hwj chim tau txais ib cheeb tsam ntawm lub ntes. Thaum lub ntsuas tau txais hluav taws xob, irradiance ntawm cov tub ntxhais kawm nkag yog: E=∫ₒ N cosθ dΩ (3-4)
Qhov sib npaug (3-4) yog qhov zoo ib yam rau (3-2), tab sis siv lub radiance ntawm lub receiver thiab sib koom ua ke ntawm qhov ntsuas qhov kev lees paub lub kaum ntse ntse. Yog tias qhov kev sib kis tau raug tsis saib xyuas, qhov chaw radiance sib npaug tau txais radiance; nrog kev poob, kev xam tseem ncaj nraim. Yog li, kev txiav txim siab qhov radiance yog qhov tseem ceeb hauv kev siv engineering.
Feem ntau, hluav taws xob los yog kev xav ntawm cov khoom yog kev taw qhia, tshwm sim tsuas yog nyob rau hauv qhov txwv cov ces kaum, lub ntsiab lus radiance nyob ntawm kev coj. Ib qho zoo tagnrho diffuse emitter (Lambertian radiator) emits uniformly rau hauv qhov chaw hemispherical nrog tas li radiance. Lub radiant siv los ntawm Lambertian nto nto raws li Lambert txoj cai cosine: dJ=N cosθ dA ∝ cosθ (3-5)
Thaum soj ntsuam ib qho khoom luminous diffuse (xws li, Lub Hnub) los ntawm ntau lub ces kaum, qhov projected cheeb tsam pom los ntawm txhua lub retinal cell tseem nyob tas li, zoo li lub kaum sab xis ntawm cov tub ntxhais kawm. Txij li Lambertian radiance yog ywj siab ntawm kev saib kev taw qhia, tau txais lub zog tas li, ua rau lub teeb ci tsis sib xws.
Rau qhov zoo tshaj plaws Lambertian emitter radiating rau hauv hemisphere, kev sib raug zoo ntawm radiant tawm thiab radiance yog: dΩ=sinθ dθ dφ M=∫ N cosθ dΩ=N ∫₀² dφ / ∫ N cosθ dΩ= N π cosθ dΩ=πN (3-6)
Qhov tseem ceeb, qhov kev tawm ntawm radiant sib npaug π lub sij hawm radiance, tsis yog 2π (tag nrho hemispherical khoom lub kaum ntse ntse).
Lub zoo meej Lambertian radiator yog ib qho qauv zoo tagnrho. Hauv kev xyaum, ntau qhov chaw kwv yees Lambertian tus cwj pwm tsuas yog nyob rau hauv kev txwv angular ranges. Rau feem ntau cov hluav taws xob insulators, radiance tuaj yeem suav hais tias kwv yees li qhov tsis tu ncua rau cov ces kaum tsawg dua lossis sib npaug li 60℃ntawm qhov qub; rau conductors, Tsawg dua los yog sib npaug li 50℃. Qee qhov chaw, xws li qee qhov222nm uv teebexcimer discharge tubes, kuj muaj nyob ze -Lambertian kev faib tawm ntawm cov ces kaum me me, ua rau lawv yooj yim raws li cov qauv txheej txheem rau ultraviolet radiometric calibration.
